Electromagnetic pulse impact characterization of MEMS devices

In order to meet the needs of microelectronic devices for EMP protection, a MEMS electromagnetic energy sparing mechanism based on the principle of microcorona discharge and MEMS process is proposed to provide a design solution for electromagnetic pulse protection of microelectronic devices. The MEMS electromagnetic energy channeling mechanism is small in size, with a fast response time and low cost, and it is the first choice of microelectronic devices for EMP protection. Based on the MEMS process, the fabrication process and response principle of the MEMS electromagnetic energy-sparing mechanism are introduced. After the design is completed, the MEMS electromagnetic energy channeling mechanism with different electrode parameters is simulated and analyzed. The simulation results show that the electrode width of 50μm produces a larger electric field strength under the same trigger voltage. The experimental results show that the electrode width of 30μm has more significant ablation effect after breakdown.